Search Results for: Capacitive Silicon Resonators

Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering application

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It

In this book, some recent advances in glass science and technology are collected. In the first part, the structure and crystallization of innovative glass compo

This book is a printed edition of the Special Issue "Micro-Resonators: The Quest for Superior Performance" that was published in Micromachines

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element