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Language: en
Pages: 308
Pages: 308
Type: BOOK - Published: 2017-12-14 - Publisher: CRC Press
The first publication of its kind in the field, this book describes comprehensively and systematically radio-frequency (rf) capacitive gas discharges of interme
Language: en
Pages: 305
Pages: 305
Type: BOOK - Published: 2017-12-14 - Publisher: CRC Press
The first publication of its kind in the field, this book describes comprehensively and systematically radio-frequency (rf) capacitive gas discharges of interme
Language: en
Pages: 405
Pages: 405
Type: BOOK - Published: 2018-05-23 - Publisher: CRC Press
This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of disc
Language: en
Pages: 343
Pages: 343
Type: BOOK - Published: 2018-05-23 - Publisher: CRC Press
This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of disc
Language: en
Pages: 392
Pages: 392
Type: BOOK - Published: 2011-02-24 - Publisher: Cambridge University Press
Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and eff