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Silicon Epitaxy
Language: en
Pages: 514
Authors:
Categories: Science
Type: BOOK - Published: 2001-09-26 - Publisher: Elsevier

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Since its inception in 1966, the series of numbered volumes known as Semiconductors and Semimetals has distinguished itself through the careful selection of wel
Epitaxial Silicon Technology
Language: en
Pages: 342
Authors: B. Jayant Baliga
Categories: Science
Type: BOOK - Published: 1986 - Publisher:

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Silicon vapor phase epitaxy / H.M. Liaw and J.W. Rose -- Silicon molecular beam epitaxy / Subramanian S. Iyer -- Silicon liquid phase epitaxy / B. Jayant Baliga
Silicon-Molecular Beam Epitaxy
Language: en
Pages: 302
Authors: E. Kasper
Categories: Technology & Engineering
Type: BOOK - Published: 2018-05-04 - Publisher: CRC Press

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This subject is divided into two volumes. Volume I is on homoepitaxy with the necessary systems, techniques, and models for growth and dopant incorporation. Thr
SiGe and Si Strained-Layer Epitaxy for Silicon Heterostructure Devices
Language: en
Pages: 373
Authors: John D. Cressler
Categories: Technology & Engineering
Type: BOOK - Published: 2017-12-19 - Publisher: CRC Press

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What seems routine today was not always so. The field of Si-based heterostructures rests solidly on the shoulders of materials scientists and crystal growers, t
Introduction to Microfabrication
Language: en
Pages: 534
Authors: Sami Franssila
Categories: Technology & Engineering
Type: BOOK - Published: 2010-10-29 - Publisher: John Wiley & Sons

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This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It