Characterization, Integration and Reliability of HfO 2 and LaLuO 3 High-kappa-metal Gate Stacks for CMOS Applications

Characterization, Integration and Reliability of HfO 2 and LaLuO 3 High-kappa-metal Gate Stacks for CMOS Applications
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Book Synopsis Characterization, Integration and Reliability of HfO 2 and LaLuO 3 High-kappa-metal Gate Stacks for CMOS Applications by : Alexander Nichau

Download or read book Characterization, Integration and Reliability of HfO 2 and LaLuO 3 High-kappa-metal Gate Stacks for CMOS Applications written by Alexander Nichau and published by . This book was released on 2013 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:


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Off state leakage current related power dominates the CMOS heat dissipation problem of state of the art silicon integrated circuits. In this study, this issue h