Handbook of VLSI Microlithography, 2nd Edition

Handbook of VLSI Microlithography, 2nd Edition
Author :
Publisher : Cambridge University Press
Total Pages : 1026
Release :
ISBN-10 : 9780080946801
ISBN-13 : 0080946801
Rating : 4/5 (01 Downloads)

Book Synopsis Handbook of VLSI Microlithography, 2nd Edition by : John N. Helbert

Download or read book Handbook of VLSI Microlithography, 2nd Edition written by John N. Helbert and published by Cambridge University Press. This book was released on 2001-04 with total page 1026 pages. Available in PDF, EPUB and Kindle. Book excerpt: This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatingsùincluding optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology may well be the first practical description of the relationship between the resist process and equipment parameters. The basics of resist technology are completely coveredùincluding an entire chapter on resist process defectivity and the potential yield limiting effect on device production. Each alternative lithographic technique and testing method is considered and evaluated: basic metrology including optical, scanning-electron-microscope (SEM) techniques and electrical test devices, along with explanations of actual printing tools and their design, construction and performance. The editor devotes an entire chapter to today's sophisticated, complex electron-beam printers, and to the emerging x-ray printing technology now used in high-density CMOS devices. Energetic ion particle printing is a controllable, steerable technology that does not rely on resist, and occupies a final section of the handbook.


Handbook of VLSI Microlithography, 2nd Edition Related Books

Handbook of VLSI Microlithography, 2nd Edition
Language: en
Pages: 1026
Authors: John N. Helbert
Categories: Technology & Engineering
Type: BOOK - Published: 2001-04 - Publisher: Cambridge University Press

DOWNLOAD EBOOK

This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin r
Handbook of VLSI Microlithography
Language: en
Pages: 1025
Authors: John N. Helbert
Categories: Technology & Engineering
Type: BOOK - Published: 2001-04-01 - Publisher: William Andrew

DOWNLOAD EBOOK

This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin r
Ultrananocrystalline Diamond
Language: en
Pages: 621
Authors: Olga A. Shenderova
Categories: Science
Type: BOOK - Published: 2006-08-10 - Publisher: William Andrew

DOWNLOAD EBOOK

Ultrananocrystalline Diamond: Syntheses, Properties, and Applications is a unique practical reference handbook that brings together the basic science of nanosca
Nanostructured Materials
Language: en
Pages: 785
Authors: Carl C. Koch
Categories: Technology & Engineering
Type: BOOK - Published: 2006-12-01 - Publisher: William Andrew

DOWNLOAD EBOOK

Nanostructured materials are one of the highest profile classes of materials in science and engineering today, and will continue to be well into the future. Pot
Vacuum Deposition onto Webs, Films, and Foils
Language: en
Pages: 497
Authors: Charles Bishop
Categories: Technology & Engineering
Type: BOOK - Published: 2006-12-20 - Publisher: William Andrew

DOWNLOAD EBOOK

This new book from William Andrew Publishing is the only practical reference available for anyone employing the roll-to-roll deposition process. Vacuum Depositi