Materials Reliability in Microelectronics V: Volume 391
Author | : Anthony S. Oates |
Publisher | : |
Total Pages | : 552 |
Release | : 1995-10-24 |
ISBN-10 | : UCSD:31822021537147 |
ISBN-13 | : |
Rating | : 4/5 (47 Downloads) |
Download or read book Materials Reliability in Microelectronics V: Volume 391 written by Anthony S. Oates and published by . This book was released on 1995-10-24 with total page 552 pages. Available in PDF, EPUB and Kindle. Book excerpt: This long-standing proceedings series is highly regarded as a premier forum for the discussion of microelectronics reliability issues. In this fifth book, emphasis is on the fundamental understanding of failure phenomena in thin-film materials. Special attention is given to electromigration and mechanical stress effects. The reliability of thin dielectrics and hot carrier degradation of transistors are also featured. Topics include: modeling and simulation of failure mechanisms; reliability issues for submicron IC technologies and packaging; stresses in thin films/lines; gate oxides; barrier layers; electromigration mechanisms; reliability issues for Cu metallizations; electromigration and microstructure; electromigration and stress voiding in circuit interconnects; and resistance measurements of electromigration damage.