Download or read book Nanolithography and Patterning Techniques in Microelectronics written by D Bucknall and published by Taylor & Francis US. This book was released on 2005-09-30 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt: Currently surface patterning is achieved by means of optical lithographic techniques but with industry moving towards the fabrication of devices with size features of 100 nm less, the technological community is looking for alternative approaches to materials fabrication at the nanoscale. By using nanolithography scientists can drive patterning currents through surfaces while building a 3D structure from a series of patterned layers. Electron induced chemical lithography can create ultra-high resolution templates for the site selective immobilisation of molecules, to form functional, hierarchic.