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The Science and Engineering of Microelectronic Fabrication
Language: en
Pages: 572
Authors: Stephen A. Campbell
Categories: Technology & Engineering
Type: BOOK - Published: 1996 - Publisher: Oxford University Press, USA

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The Science and Engineering of Microelectronic Fabrication provides an introduction to microelectronic processing. Geared towards a wide audience, it may be use
Fabrication Engineering at the Micro and Nanoscale
Language: en
Pages: 0
Authors: Stephen A. Campbell
Categories: Technology & Engineering
Type: BOOK - Published: 2008-01-10 - Publisher: OUP USA

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Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering
Introduction to Microelectronic Fabrication
Language: en
Pages: 0
Authors: Richard C. Jaeger
Categories: Integrated circuit
Type: BOOK - Published: 2002 - Publisher: Pearson

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For courses in Theory and Fabrication of Integrated Circuits. The author's goal in writing this text was to present a concise survey of the most up-to-date tech
Electron-Beam Technology in Microelectronic Fabrication
Language: en
Pages: 377
Authors: George Brewer
Categories: Technology & Engineering
Type: BOOK - Published: 2012-12-02 - Publisher: Elsevier

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Electron-Beam Technology in Microelectronic Fabrication presents a unified description of the technology of high resolution lithography. This book is organized
Plasma Electronics
Language: en
Pages: 355
Authors: Toshiaki Makabe
Categories: Science
Type: BOOK - Published: 2006-03-27 - Publisher: CRC Press

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Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities,