Download or read book Chemical Vapor Deposition of Refractory Metals and Ceramics: Volume 168 written by Theodore M. Besmann and published by . This book was released on 1990-04-11 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt: Papers originally presented at the symposium on [title] held in Boston, November/December 1989. The contributions are organized into six sections, covering fundamentals/modeling, diagnostics, process- microstructure relationships, microstructure-mechanical property relationships, novel/large-scale technologies, and metal-organic chemical vapor deposition. Acidic paper. Annotation copyrighted by Book News, Inc., Portland, OR