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Language: en
Pages: 740
Pages: 740
Type: BOOK - Published: 2005 - Publisher: Springer Science & Business Media
Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). Mor
Language: en
Pages: 710
Pages: 710
Type: BOOK - Published: 2010-10-21 - Publisher: Springer
Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). Mor
Language: en
Pages: 562
Pages: 562
Type: BOOK - Published: 1999-09-07 - Publisher: Elsevier
Recent developments in microelectronics technologies have created a great demand for interlayer dielectric materials with a very low dielectric constant. They w
Language: en
Pages: 262
Pages: 262
Type: BOOK - Published: 2000 - Publisher: The Electrochemical Society
Contains papers from a May 2000 symposium, representing the state of the art in areas of dielectric materials science and process integration. Papers are arrang
Language: en
Pages: 515
Pages: 515
Type: BOOK - Published: 2013-06-25 - Publisher: Springer Science & Business Media
"The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, includ
