Materials for Mechanical and Optical Microsystems: Volume 444
Author | : Michael L. Reed |
Publisher | : |
Total Pages | : 264 |
Release | : 1997-03-30 |
ISBN-10 | : UOM:39015040739446 |
ISBN-13 | : |
Rating | : 4/5 (46 Downloads) |
Download or read book Materials for Mechanical and Optical Microsystems: Volume 444 written by Michael L. Reed and published by . This book was released on 1997-03-30 with total page 264 pages. Available in PDF, EPUB and Kindle. Book excerpt: A selection of 33 reviewed papers explore the materials aspects of microsystems, especially those involving mechanical, optical, and thermal components. The topics include technology for micro- assembling, selective electroless copper metallization of epoxy substrates, an improved auto-adhesion measurement method for micro-machines polysilicon beams, patterned sol-gel structures by micro-molding in capillaries, the experimental analysis of the process of anodic bonding using an evaporated glass layer, the effect of inorganic thin film material processing and properties on stress in silicon piezoresistive pressure sensors, and photoconductivity in vacuum-deposited films of silicon-based polymers. Annotation copyrighted by Book News, Inc., Portland, OR