Materials Reliability in Microelectronics VI: Volume 428

Materials Reliability in Microelectronics VI: Volume 428
Author :
Publisher :
Total Pages : 616
Release :
ISBN-10 : UCSD:31822023639776
ISBN-13 :
Rating : 4/5 (76 Downloads)

Book Synopsis Materials Reliability in Microelectronics VI: Volume 428 by : William F. Filter

Download or read book Materials Reliability in Microelectronics VI: Volume 428 written by William F. Filter and published by . This book was released on 1996-11-18 with total page 616 pages. Available in PDF, EPUB and Kindle. Book excerpt: MRS books on materials reliability in microelectronics have become the snapshot of progress in this field. Reduced feature size, increased speed, and larger area are all factors contributing to the continual performance and functionality improvements in integrated circuit technology. These same factors place demands on the reliability of the individual components that make up the IC. Achieving increased reliability requires an improved understanding of both thin-film and patterned-feature materials properties and their degradation mechanisms, how materials and processes used to fabricate ICs interact, and how they may be tailored to enable reliability improvements. This book focuses on the physics and materials science of microelectronics reliability problems rather than the traditional statistical, accelerated electrical testing aspects. Studies are grouped into three large sections covering electromigration, gate oxide reliability and mechanical stress behavior. Topics include: historical summary; reliability issues for Cu metallization; characterization of electromigration phenomena; modelling; microstructural evolution and influences; oxide and device reliability; thin oxynitride dielectrics; noncontact diagnostics; stress effects in thin films and interconnects and microbeam X-ray techniques for stress measurements.


Materials Reliability in Microelectronics VI: Volume 428 Related Books

Materials Reliability in Microelectronics VI: Volume 428
Language: en
Pages: 616
Authors: William F. Filter
Categories: Technology & Engineering
Type: BOOK - Published: 1996-11-18 - Publisher:

DOWNLOAD EBOOK

MRS books on materials reliability in microelectronics have become the snapshot of progress in this field. Reduced feature size, increased speed, and larger are
Materials Reliability in Microelectronics
Language: en
Pages: 392
Authors:
Categories: Microelectronics
Type: BOOK - Published: 1999 - Publisher:

DOWNLOAD EBOOK

Materials Issues in Art and Archaeology V: Volume 462
Language: en
Pages: 464
Authors: Pamela B. Vandiver
Categories: Technology & Engineering
Type: BOOK - Published: 1997-10-15 - Publisher:

DOWNLOAD EBOOK

This book presents cutting-edge multidisciplinary work on the characterization of ancient materials; the technologies of selection, production and usage by whic
Microporous and Macroporous Materials: Volume 431
Language: en
Pages: 576
Authors: Raul F. Lobo
Categories: Technology & Engineering
Type: BOOK - Published: 1996-11-05 - Publisher:

DOWNLOAD EBOOK

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Materials for Mechanical and Optical Microsystems: Volume 444
Language: en
Pages: 264
Authors: Michael L. Reed
Categories: Mathematics
Type: BOOK - Published: 1997-03-30 - Publisher:

DOWNLOAD EBOOK

A selection of 33 reviewed papers explore the materials aspects of microsystems, especially those involving mechanical, optical, and thermal components. The top