Plasma Processing of Semiconductors
Author | : Paul Williams |
Publisher | : Springer Science & Business Media |
Total Pages | : 634 |
Release | : 1997-05-31 |
ISBN-10 | : 0792345673 |
ISBN-13 | : 9780792345671 |
Rating | : 4/5 (73 Downloads) |
Download or read book Plasma Processing of Semiconductors written by Paul Williams and published by Springer Science & Business Media. This book was released on 1997-05-31 with total page 634 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.