Plasma Processing of Semiconductors

Plasma Processing of Semiconductors
Author :
Publisher : Springer Science & Business Media
Total Pages : 634
Release :
ISBN-10 : 0792345673
ISBN-13 : 9780792345671
Rating : 4/5 (73 Downloads)

Book Synopsis Plasma Processing of Semiconductors by : Paul Williams

Download or read book Plasma Processing of Semiconductors written by Paul Williams and published by Springer Science & Business Media. This book was released on 1997-05-31 with total page 634 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.


Plasma Processing of Semiconductors Related Books

Plasma Processing of Semiconductors
Language: en
Pages: 634
Authors: Paul Williams
Categories: Technology & Engineering
Type: BOOK - Published: 1997-05-31 - Publisher: Springer Science & Business Media

DOWNLOAD EBOOK

Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numeric
Plasma Processing of Semiconductors
Language: en
Pages: 610
Authors: P.F. Williams
Categories: Technology & Engineering
Type: BOOK - Published: 2013-11-11 - Publisher: Springer Science & Business Media

DOWNLOAD EBOOK

Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numeric
Lecture Notes on Principles of Plasma Processing
Language: en
Pages: 213
Authors: Francis F. Chen
Categories: Science
Type: BOOK - Published: 2012-12-06 - Publisher: Springer Science & Business Media

DOWNLOAD EBOOK

Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are exper
Plasma Processes for Semiconductor Fabrication
Language: en
Pages: 235
Authors: W. N. G. Hitchon
Categories: Computers
Type: BOOK - Published: 1999-01-28 - Publisher: Cambridge University Press

DOWNLOAD EBOOK

An up-to-date description of plasma etching and deposition in semiconductor fabrication.
Dry Etching Technology for Semiconductors
Language: en
Pages: 126
Authors: Kazuo Nojiri
Categories: Technology & Engineering
Type: BOOK - Published: 2014-10-25 - Publisher: Springer

DOWNLOAD EBOOK

This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniat