The Physics and Chemistry of SiO2 and the Si-SiO2 Interface--5
| Author | : Hisham Z. Massoud |
| Publisher | : ECS Transactions |
| Total Pages | : 304 |
| Release | : 2005-01-01 |
| ISBN-10 | : 1566774306 |
| ISBN-13 | : 9781566774307 |
| Rating | : 4/5 (06 Downloads) |
Book Synopsis The Physics and Chemistry of SiO2 and the Si-SiO2 Interface--5 by : Hisham Z. Massoud
Download or read book The Physics and Chemistry of SiO2 and the Si-SiO2 Interface--5 written by Hisham Z. Massoud and published by ECS Transactions. This book was released on 2005-01-01 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt: This issue of ECS Transactions places a focus on ultrathin gate dielectrics: novel technologies, characterization methods, process modeling, fundamental limits, and projections for scaling the gate oxide thickness.
